JPS6335091B2 - - Google Patents
Info
- Publication number
- JPS6335091B2 JPS6335091B2 JP10458978A JP10458978A JPS6335091B2 JP S6335091 B2 JPS6335091 B2 JP S6335091B2 JP 10458978 A JP10458978 A JP 10458978A JP 10458978 A JP10458978 A JP 10458978A JP S6335091 B2 JPS6335091 B2 JP S6335091B2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- furnace
- gas
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10458978A JPS5530869A (en) | 1978-08-28 | 1978-08-28 | Furnace core tube for use in diffusion furnace and method of washing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10458978A JPS5530869A (en) | 1978-08-28 | 1978-08-28 | Furnace core tube for use in diffusion furnace and method of washing same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11185889A Division JPH0249421A (ja) | 1989-04-28 | 1989-04-28 | 拡散炉用炉心管の構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5530869A JPS5530869A (en) | 1980-03-04 |
| JPS6335091B2 true JPS6335091B2 (en]) | 1988-07-13 |
Family
ID=14384613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10458978A Granted JPS5530869A (en) | 1978-08-28 | 1978-08-28 | Furnace core tube for use in diffusion furnace and method of washing same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5530869A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311622A (ja) * | 1989-06-09 | 1991-01-18 | Toshiba Ceramics Co Ltd | 排気キャップ |
-
1978
- 1978-08-28 JP JP10458978A patent/JPS5530869A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5530869A (en) | 1980-03-04 |
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